GB/T 27760-2011

Active

Test method for calibrating the z-magnification of an atomic force microscope at subnanometer displacement levels using si (111) monatomic steps

利用Si（111）晶面原子台阶对原子力显微镜亚纳米高度测量进行校准的方法

Standard Type
GBT
ICS
19.020
CCS
N04
Status
Active
Issue Date
2011-12-30
Implementation
2012-05-01
Centralized Committee
中国科学院
Issuing Authority
中华人民共和国国家质量监督检验检疫总局、中国国家标准化管理委员会

Application Summary AI generated

This standard specifies a test method for calibrating the z-axis (vertical) magnification of atomic force microscopes (AFMs) at subnanometer displacement levels by using the monatomic steps on a Si (111) crystal surface as a reference. It is applied in nanometrology and materials science laboratories to ensure accurate height measurements of nanostructures, thin films, and surface features at the atomic scale. The standard is particularly relevant for quality control and research in semiconductor manufacturing, nanotechnology, and precision engineering where subnanometer vertical resolution is critical.

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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.