GB/T 26113-2010
ActiveMicro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters
微机电系统（MEMS）技术 微几何量评定总则
Application Summary AI generated
This standard provides general rules and methodologies for assessing micro-geometrical parameters, such as surface roughness, step height, and linewidth, in Micro-Electromechanical Systems (MEMS). It is applied in the design, manufacturing, and quality control of MEMS devices, including sensors, actuators, and microfluidic components, to ensure dimensional accuracy and functional performance. The standard is used by engineers and testing laboratories in the electronics and semiconductor industries for evaluating microfabricated structures.
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