GB/T 26111-2010
AbolishedMicro-electromechanical system technology - Terms
微机电系统（MEMS）技术 术语
Application Summary AI generated
This standard defines a unified set of terminology for micro-electromechanical systems (MEMS), covering key concepts such as design, fabrication processes, packaging, and testing. It is applied in the Chinese electronics and semiconductor industries to ensure consistent communication among engineers, researchers, and manufacturers working on MEMS devices like accelerometers, pressure sensors, and micro-mirrors. The standard is also used in technical documentation, product specifications, and quality assurance testing for MEMS components.
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