GB/T 25915.14-2022
ActiveCleanrooms and associated controlled environments—Part 14: Assessment of suitability for use of equipment by airborne particle concentration
洁净室及相关受控环境 第14部分：按粒子浓度评估设备适用性
Application Summary AI generated
This standard specifies methods for evaluating whether equipment is suitable for use in cleanrooms by measuring the concentration of airborne particles it generates or affects. It is applied in industries such as semiconductor manufacturing, pharmaceuticals, and biotechnology, where equipment must be tested to ensure it does not contaminate controlled environments. The standard guides procurement and qualification processes for tools like process machines, robotics, or cleanroom furniture.
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Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.