GB/T 17865-1999
ActiveSpecification for measuring depth of focus and best focus
焦深与最佳聚焦的测量规范
Application Summary AI generated
This standard specifies the measurement methods for determining the depth of focus and best focus position in optical systems, particularly for integrated circuit lithography equipment and photomask inspection tools. It is applied in the semiconductor manufacturing industry to ensure precise image formation and critical dimension control during photolithography processes. The standard provides testing protocols for evaluating the performance of projection lenses and focusing mechanisms in wafer steppers and scanners.
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