GB/T 17864-1999

Active

CD Metrology procedures

关键尺寸(CD)计量方法

Standard Type
GBT
ICS
31.200
CCS
L56
Status
Active
Issue Date
1999-09-13
Implementation
2000-06-01
Centralized Committee
国家标准委
Issuing Authority
国家质量技术监督局

Application Summary AI generated

This standard specifies measurement methods for critical dimensions (CD) in semiconductor manufacturing, such as line widths and feature sizes on integrated circuits. It is applied in the electronics industry for process control and quality assurance during photolithography and etching steps. The procedures ensure accurate and repeatable CD measurements, which are essential for device performance and yield in wafer fabrication facilities.

Related Standards

GB/T 19403.1-2003 Semiconductor devices--Integrated circuits--Part 11:Section 1:Internal visual examination for semiconductor integrated circuits(excluding hybrid circuits) GB/T 17574.10-2003 Semiconductor devices--Integrated circuits--Part 2-10:Digital integrated circuits--Blank detail specification for integrated circuit dynamicread/write memories GB/Z 43510-2023 Integrated circuit TSV 3D package reliability test methods guideline GB/T 19248-2003 Test method for measuring the resistance of package leads GB/T 18500.2-2001 Semiconductor devices--Integrated circuits--Part 4:Interface integrated circuits--Section 2:Blank detail specification for linear analogue-to-digital converters(ADC) GB/T 18500.1-2001 Semiconductor devices--Integrated circuits--Part 4:Interface integrated circuits--Section 1:Blank detail specification for linear digital-to-analogue converters(DAC) GB/T 5965-2000 Semiconductor devices--Integrated circuits--Part 2:Digital integrated circuits--Section one--Blank detail specification for bipolar monolithic digital integrated circuit gates(excluding uncommitted logic arrays) GB/T 17940-2000 Semiconductor devices--Integrated circuits--Part 3:Analogue integrated circuits
Transparency note: The application summary and key sentences on this page were automatically generated by AI from the standard's original text. This content has not been human-verified and should not be used for compliance or regulatory purposes. Always refer to the official standard document from the issuing authority.