GB/T 16878-1997
ActiveSpecification for metrology pattern cells for integrated circuit manufacture
用于集成电路制造技术的检测图形单元规范
Application Summary AI generated
This standard specifies the design and layout requirements for metrology pattern cells used in integrated circuit manufacturing. It is applied in semiconductor fabrication facilities to ensure consistent and accurate measurement of critical dimensions, overlay alignment, and film thickness during photolithography and etching processes. The standard supports quality control and process monitoring in the production of microchips and other microelectronic devices.
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