GB/T 16527-1996
ActiveSpecification for photoresist/E-beam resist for hard surface photoplates
硬面感光板中光致抗蚀剂和电子束抗蚀剂规范
Application Summary AI generated
This standard specifies the technical requirements, test methods, and quality acceptance criteria for photoresist and electron-beam resist materials used in the production of hard surface photoplates. It is applied in the semiconductor and microelectronics industries, specifically for manufacturing photomasks and reticles where precise pattern transfer onto hard substrates like chromium-coated quartz is required. The standard ensures consistent resist performance in photolithography and electron-beam lithography processes for integrated circuit fabrication.
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