GB/T 15872-2013
ActivePower supply interface for semiconductor equipment
半导体设备电源接口
Application Summary AI generated
This standard specifies the electrical and mechanical interface requirements for power supply connections used in semiconductor manufacturing equipment. It is applied in the design, installation, and compatibility testing of power systems for wafer fabrication tools, lithography machines, and other semiconductor processing devices. The standard ensures consistent voltage, current ratings, and connector configurations across different equipment brands and facilities.
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