GB/T 15872-1995
AbolishedPower supply interface for semiconductor equipment
半导体设备电源接口
Application Summary AI generated
This standard specifies the voltage, frequency, current ratings, and connector configurations for the power supply interface of semiconductor manufacturing equipment. It is applied in the design, installation, and compatibility testing of tools such as wafer processing machines, lithography systems, and etching equipment within semiconductor fabrication facilities. The standard ensures uniform electrical connections between equipment and facility power distribution systems, preventing mismatches and operational hazards.
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