GB/T 10067.410-2014
ActiveBasic specifications for electroheat installations―Part 410: Single crystal growing furnace
电热装置基本技术条件 第410部分：单晶炉
Application Summary AI generated
This standard specifies the basic technical conditions, including requirements for design, manufacturing, performance, safety, and testing, specifically for single crystal growing furnaces used in the semiconductor and photovoltaic industries. It applies to the production of monocrystalline silicon ingots via the Czochralski method, ensuring furnace reliability and product quality in high-temperature crystal growth processes. The standard serves as a technical basis for equipment procurement, acceptance inspection, and quality certification in manufacturing facilities.
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